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The Tempress diffusion system is a modular horizontal furnace designed to process silicon wafers as part of the manufacturing technology of semiconductor, optical, MEMS, and solar devices. Annealing in metallurgy, and material science, is a heat treatment wherein, a material is altered, causing a change in its properties such as strength, and hardness. It is a process that produces conditions by heating, and maintaining a suitable temperature, and then cooling. Annealing is used to induce softness, relieve internal stress, and to refine the structure.

Tempress S6T1 - Annealing
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Equipment Details
Technology Thermal processing
Materials Restriction Metals
Sample Size Pieces up to 100 mm (4")
Gases Used N2, O2, 5% H2/N2
Equipment Manual
Overview System Overview
Operating Procedure SOP
Supported Processes Supported Processes
Maintenance Maintenance

Contents

Announcements

  • No announcements at this time.

Capabilities

  • Annealing
  • Dry Oxide
  • Maximum temperature - 1100°C

System overview

Hardware details

  • N2 - Maximum flow 10 slpm
  • O2 - Maximum flow 10 slpm
  • 5% H2/N2 - Maximum flow 10 slpm

Substrate requirements

  • Silicon only
  • Pieces up to 150 mm (6") wafers - 150 mm (6") wafers must lie flat on top of boats
  • Can process up to 25, 100 mm (4") wafers, or 4, 150 mm (6") wafers
  • A solvent clean must be performed on any samples prior to the run
    • 5 min clean Acetone
    • 5 min clean IPA
    • 5 min fresh clean Acetone
    • 5 min fresh clean IPA
    • 3 min DI rinse

Material restrictions

The Tempress S6T1 - Annealing is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.


Supported processes

Process details

  • N/A

Characterization data

  • N/A

Standard operating procedure

Checkout procedure

  1. Create a Help desk Ticket requesting training.
  2. A process engineer will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
  3. Schedule a checkout session with a tool engineer via the Help desk Ticket system. If this checkout is successful, the engineer will authorize you on the tool.

Maintenance