Thermal evaporation
Thermal evaporation is a form of physical vapor deposition in which high-purity metal source material is heated by passing current through a resistive metal "boat" and the material is transformed into vapor.
| Thermal evaporation | |
|---|---|
| Technology Details | |
| Materials | Al, Cr, , Ti, |
 Warning: | This page has not been released yet. |
Contents
Method of operation
TBD - Currently no tool is available for thermal evaporation
Applications
![[icon]](/wiki/File:Wiki_letter_w.svg){kind=small} | This section requires expansion. |
Figures of merit/Parameters
| | This section requires expansion. |
Materials
The following materials can be deposited at the LNF using thermal evaporation:
Equipment
| | This section requires expansion. |
See also
Further reading
 | This section may require cleanup to meet the LNF wiki's quality standards. The specific problem is: this is the link to the e-beam evaporation overview. |