Thermal evaporation

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Thermal evaporation
Technology Details
Materials Al, Cr, , Ti,
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Thermal evaporation is a form of physical vapor deposition in which high-purity metal source material is heated by passing current through a resistive metal "boat" and the material is transformed into vapor.

Method of operation

TBD - Currently no tool is available for thermal evaporation

Applications

Figures of merit/Parameters

Materials

The following materials can be deposited at the LNF using thermal evaporation:

Equipment

See also

Further reading