Difference between revisions of "Thermal processing"

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==Further reading==
 
==Further reading==
 +
*[http://lnf-wiki.eecs.umich.edu/wiki/User_Resources#LNF_Tech_Talks_.28technology_seminar_series.29 LNF Tech Talk for Thermal Processing is Coming Soon!]
 
* Other stuff, e.g. technology workshop slides
 
* Other stuff, e.g. technology workshop slides
 
* External links (can be in another section below, if appropriate)
 
* External links (can be in another section below, if appropriate)

Latest revision as of 08:46, 31 March 2020

Thermal processing is...

"Technology groups" are top level technology pages and should provide a brief description of why it is a group and then an overview of technologies within that group.

See Etching and Metrology for examples of technology group pages.

Technologies

Here is where you describe technologies within the group.

Annealing

Main article: Annealing

Describe the technology, particularly including why you might use it over another within the same group.

Thermal oxidation

Main article: Thermal oxidation

Here's another technology in that group.

Diffusion and doping

Main article: Thermal oxidation

Here's another technology in that group.

Curing

Main article: Thermal oxidation

Here's another technology in that group.

Figures of Merit

What is important to look for in the technology? Etch/dep rate? Resolution?

FOM 1

Subheadings are optional.

Applications

How is this technology used in nanofabrication and what types of devices/research areas is it useful in?

Equipment

Specific equipment for each technology can be found on its page above. Additionally, below is a list of all metrology equipment in the LNF:


See also

Other related wiki pages

References


Further reading