Difference between revisions of "User Resources"

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*[https://docs.google.com/document/d/1OwW_EG5_kB060kTvhDwRPZoYymRMo1UDE-d6ejSxgII/preview LNF user manual part I: general information]
 
*[https://docs.google.com/document/d/1OwW_EG5_kB060kTvhDwRPZoYymRMo1UDE-d6ejSxgII/preview LNF user manual part I: general information]
 
*[https://docs.google.com/document/d/1dxMY7J_3RII0U54gSh7R0ZSibeMrhHqLmqmS2mp8xNc/preview LNF user manual part II: emergency procedures]
 
*[https://docs.google.com/document/d/1dxMY7J_3RII0U54gSh7R0ZSibeMrhHqLmqmS2mp8xNc/preview LNF user manual part II: emergency procedures]
*[https://docs.google.com/presentation/d/1QUxBzprXqatIV1GMUBSSC9hTXtRYRr0syOKgrphuquY/preview Slides from the new user info sessions], updated October 2019.
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*[https://docs.google.com/presentation/d/1QUxBzprXqatIV1GMUBSSC9hTXtRYRr0syOKgrphuquY/preview Slides from the new user info sessions], updated October 2021.
 +
*[[LNF_Mentor_Responsibilities_and_Guidelines|Mentor responsibilities and guidelines]]
 
*[[Requesting Visitor Access|Requesting visitor access]]
 
*[[Requesting Visitor Access|Requesting visitor access]]
 
*[[Requesting Observer Access|Requesting observer access]]
 
*[[Requesting Observer Access|Requesting observer access]]
 
*[[Requesting Access for Students Attending a Demonstration or Camp|Requesting access for students attending a demonstration or camp]]
 
*[[Requesting Access for Students Attending a Demonstration or Camp|Requesting access for students attending a demonstration or camp]]
 
*[[Professional Conduct Policy|Professional conduct policy]]
 
*[[Professional Conduct Policy|Professional conduct policy]]
*[[Private Beaker Storage|Private beaker storage]]
 
 
*[[Badges/Name Tag Policy|Badges and name tags policy]]
 
*[[Badges/Name Tag Policy|Badges and name tags policy]]
 
*[[Locker and Gowning Room Policies|Locker and gowning room policy]]
 
*[[Locker and Gowning Room Policies|Locker and gowning room policy]]
 
*[https://docs.google.com/document/d/1K3KOJZXYAVwMuOAuDaYLd76moMwaFFnmTOIyXbfGPUc/preview LNF User Memorandum of Understanding (to read and/or print)]
 
*[https://docs.google.com/document/d/1K3KOJZXYAVwMuOAuDaYLd76moMwaFFnmTOIyXbfGPUc/preview LNF User Memorandum of Understanding (to read and/or print)]
*[[DI water request]]
 
 
*[[Data Purge Policy]]
 
*[[Data Purge Policy]]
  
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*[[Private Chemical Policy]]
 
*[[Private Chemical Policy]]
 
*[[Procedure for bringing a new chemical into the LNF]]
 
*[[Procedure for bringing a new chemical into the LNF]]
 +
*[[Private Beaker Storage|Private beaker storage]]
 +
*[[DI water request]]
  
 
==After-hours lab access==
 
==After-hours lab access==
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*[[Apportionment_Instructions|How to distribute your room charges if you have multiple active accounts (lab time apportionment)]]
 
*[[Apportionment_Instructions|How to distribute your room charges if you have multiple active accounts (lab time apportionment)]]
 
*[[Financial_Memos|Archived financial memos and related files]] including tool rates and complete fee schedules.
 
*[[Financial_Memos|Archived financial memos and related files]] including tool rates and complete fee schedules.
*[[Internal_Billing_Procedure|Internal (U-M) billing procedure]] and details of the [[User_Subsidy|CoE subsidy to internal users]]
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*[[Internal_Billing_Procedure|Internal (U-M) billing procedure]] and details of the CoE-funded [[Charge_Reduction_Programs|charge reduction programs for internal users]]
 
*[[Online_Usage_Report|How to obtain LNF usage reports from the Online System (for both users and PIs)]]
 
*[[Online_Usage_Report|How to obtain LNF usage reports from the Online System (for both users and PIs)]]
 
*Note that we are developing a [[PI Dashboard|Dashboard for Principal Investigators]] which will also include other relevant information for PIs.
 
*Note that we are developing a [[PI Dashboard|Dashboard for Principal Investigators]] which will also include other relevant information for PIs.
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==Communications==
 
==Communications==
 
===User communication meetings===
 
===User communication meetings===
{{note|The next User Communication Meeting will be scheduled later in Spring 2021|reminder}}
+
{{note|The next User Communication Meeting will be scheduled later in Spring 2022|reminder}}
  
 
Please see below for slides presented during recent LNF User Communication Meetings, which provide updates about lab operations and other information relevant to the user community. <br>
 
Please see below for slides presented during recent LNF User Communication Meetings, which provide updates about lab operations and other information relevant to the user community. <br>
[https://docs.google.com/presentation/d/1XI_AEXV5xpR2yKjtUo2Ne_ubKgWY3marM3_V0D-h3N0/preview October 29th, 2020 presentation slides] and [https://umich.app.box.com/s/6ppw62cb8qngm5rf8cflv6mre2c32ub7 video recording]<br>
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[https://docs.google.com/presentation/d/1h7VpPly_GkNLBFUBTnUHOHKY10K-5hkk6lb4ysZyaY4/preview November 18, 2021 presentation slides]<br>
 +
[https://docs.google.com/presentation/d/1XI_AEXV5xpR2yKjtUo2Ne_ubKgWY3marM3_V0D-h3N0/preview October 29th, 2020 presentation slides] and [https://www.dropbox.com/s/6tg5l0ofrqw09rn/2020-10-29%20user%20comm%20zoom_1_Trim.mp4?dl=0 video recording]<br>
 
[https://docs.google.com/presentation/d/1qISkzQdSNP_OBRd0vtwzlxa7lKBjgAKg3rGGElEx2JQ/preview October 4th, 2019]<br>
 
[https://docs.google.com/presentation/d/1qISkzQdSNP_OBRd0vtwzlxa7lKBjgAKg3rGGElEx2JQ/preview October 4th, 2019]<br>
 
[https://docs.google.com/presentation/d/1dlL3TU5lHCSufJA9_spRtXye5FC_9YBjPbtyjI596-4/preview March 29th, 2019]<br>
 
[https://docs.google.com/presentation/d/1dlL3TU5lHCSufJA9_spRtXye5FC_9YBjPbtyjI596-4/preview March 29th, 2019]<br>
[https://docs.google.com/presentation/d/1rDxr40HmZoS9RASnPkXeOWh0mb9znZ_Q4tF5Lrb5K1I/preview September 28th, 2018]<br>
 
[https://docs.google.com/presentation/d/11LPlSfCB0szsHbdkQMlkYz65mBZUINj6ERsAhMvpZXg/preview April 26th, 2018]<br>
 
  
 
[[User_Communication_Meetings|Slides from earlier user communication meetings]]
 
[[User_Communication_Meetings|Slides from earlier user communication meetings]]
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* [[Wet_chemical_processing#Training_Modules|Wet chemical processing]]
 
* [[Wet_chemical_processing#Training_Modules|Wet chemical processing]]
 
* [[Optical_lithography#Training_modules|Optical lithography]]  
 
* [[Optical_lithography#Training_modules|Optical lithography]]  
* Introduction to Physical Vapor Deposition (PVD) - coming soon
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* [https://rise.articulate.com/share/Ao7oMeRC8efjEeqElzqlBiPE6uyJ9y-T#/ Introduction to Physical Vapor Deposition (PVD)]
 
* [[Sample_mounting#Training_modules | Wafer mounting for RIE]]
 
* [[Sample_mounting#Training_modules | Wafer mounting for RIE]]
 
* [[Mask_making#Training_Modules|Tutorial for photomask designing in K-Layout]]
 
* [[Mask_making#Training_Modules|Tutorial for photomask designing in K-Layout]]
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Slides from the 5/29/20 talk on ramping up research activities at the LNF are [https://docs.google.com/presentation/d/1R3O-nnruybOTl3LmmRGZai1XnpuHxgynkBBUjEWL1Fs/preview here] and more details are available on the dedicated [[COVID-19|LNF wiki COVID-19 updates page]]
 
Slides from the 5/29/20 talk on ramping up research activities at the LNF are [https://docs.google.com/presentation/d/1R3O-nnruybOTl3LmmRGZai1XnpuHxgynkBBUjEWL1Fs/preview here] and more details are available on the dedicated [[COVID-19|LNF wiki COVID-19 updates page]]
  
*[[Lithography|Photolithography]] May 22, 2020, Katharine Beach, Matt Gutierrez and Shawn Wright [https://umich.box.com/s/bb9k3aeen0uinnqhzg2xh8vqh3zhrwjy Video recording] and [https://docs.google.com/presentation/d/17F-WF-LKD7ACiUUAfYYGo2lzBGIOwCK8V7203CqC9OA/preview complete slides]
+
*[[Lithography|Photolithography]] May 22, 2020, Katharine Beach, Matt Gutierrez and Shawn Wright [https://www.dropbox.com/s/1bbnh58s1meme5i/2020-05%20optical%20litho_Trim.mp4?dl=0 Video recording] and [https://docs.google.com/presentation/d/17F-WF-LKD7ACiUUAfYYGo2lzBGIOwCK8V7203CqC9OA/preview complete slides]
 
*[[Metrology]]  May 15, 2020, Brian Armstrong Video recording (coming soon) and [https://docs.google.com/presentation/d/1S4GWCo_FAU5hZz75IVnwQZIR9vFNWHWdaCWxVCAf8jo/preview complete slides]
 
*[[Metrology]]  May 15, 2020, Brian Armstrong Video recording (coming soon) and [https://docs.google.com/presentation/d/1S4GWCo_FAU5hZz75IVnwQZIR9vFNWHWdaCWxVCAf8jo/preview complete slides]
*[[Mask_making|Mask Making]] May 8, 2020, Jorge Barreda [https://umich.box.com/s/y6myoic4urlaiwjqt343g8gy7lllok11 Video recording] and [https://docs.google.com/presentation/d/1fhmNWuLqjzfkOxYfm6Y1BCACEDoVF9xLIMhh-kG1Ep8/preview complete slides]
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*[[Mask_making|Mask Making]] May 8, 2020, Jorge Barreda [https://www.dropbox.com/s/2ra5y0zlznk1sf4/2020-05%20mask%20making-08T13_05.mp4?dl=0 Video recording] and [https://docs.google.com/presentation/d/1fhmNWuLqjzfkOxYfm6Y1BCACEDoVF9xLIMhh-kG1Ep8/preview complete slides]
*[[Wire_bonding|Wire Bonding]] May 1, 2020, Steven Sostrom, Jorge Barreda [https://umich.box.com/s/rxuhc0o5mkrh39hmqnpwjq7lrmur5m2n Video recording] and [https://docs.google.com/presentation/d/1iM72G8e6tuxfXPwdQEVi4kAHYAhPvFJrPW8IZwk7LWE/preview complete slides]
+
*[[Wire_bonding|Wire Bonding]] May 1, 2020, Steven Sostrom, Jorge Barreda [https://www.dropbox.com/s/01aedu5jeim7wqz/2020-05%20wire%20bonding-01T13_05_Trim.mp4?dl=0 Video recording] and [https://docs.google.com/presentation/d/1iM72G8e6tuxfXPwdQEVi4kAHYAhPvFJrPW8IZwk7LWE/preview complete slides]
*[[RIE]] April 24, 2020, Kevin Owen [https://umich.box.com/s/eronos5apmx0o8bgxtditiduvrp4q9tr Video recording] and [https://docs.google.com/presentation/d/1D6_EbBLsyKWUzFyx0cuYKqT7DbL4x8UntIKdHfOqkfE/preview complete slides]
+
*[[RIE]] April 24, 2020, Kevin Owen [https://www.dropbox.com/s/o3skuv2ax14qo25/2020-04%20RIE-24T13_04_Trim1.mp4?dl=0 Video recording] and [https://docs.google.com/presentation/d/1D6_EbBLsyKWUzFyx0cuYKqT7DbL4x8UntIKdHfOqkfE/preview complete slides]
*[[PVD]] April 17, 2020, Matt Oonk and Sam Edwards: [https://umich.box.com/s/m0l2cz0rw5if2fguwdq5thlcpr55uhvh Video recording] and [https://docs.google.com/presentation/d/1sW4ATeUm4USs09ZLNQ0RlNxeCE9E33Lzpsx-5WdOPa4/preview complete slides]
+
*[[PVD]] April 17, 2020, Matt Oonk and Sam Edwards: [https://www.dropbox.com/s/f7wt5ot4nmt9rvo/2020-04%20PVD%20video%20recording.mp4?dl=0 Video recording] and [https://docs.google.com/presentation/d/1sW4ATeUm4USs09ZLNQ0RlNxeCE9E33Lzpsx-5WdOPa4/preview complete slides]
*[[Electron_beam_lithography|E-beam Lithography]] Part 1 of 2 - April 10, 2020, Vishva Ray: [https://umich.box.com/s/ztmybw0icy2zomreliowb7sg0bu008fc Video recording] and [https://docs.google.com/presentation/d/1Ed_0UqhusAUNK_Zwmk5fsTqqOQh6Rk6_dwbxNs8aSuw/preview complete slides]
+
*[[Electron_beam_lithography|E-beam Lithography]] Part 1 of 2 - April 10, 2020, Vishva Ray: [https://www.dropbox.com/s/rontmmszlcermf9/2020-04%20EBL%20part1-Video%20Recording.mp4?dl=0 Video recording] and [https://docs.google.com/presentation/d/1Ed_0UqhusAUNK_Zwmk5fsTqqOQh6Rk6_dwbxNs8aSuw/preview complete slides]
 
*Metal-Semiconductor Contacts and their applications to devices - October 19, 2018, Jorge Barreda: [http://leccap.engin.umich.edu/leccap/viewer/r/nMShPx Video recording] and [https://drive.google.com/file/d/1HjQNYmNkE090E52Wd8ZY5bJcL9WpcS_b/view complete slides]
 
*Metal-Semiconductor Contacts and their applications to devices - October 19, 2018, Jorge Barreda: [http://leccap.engin.umich.edu/leccap/viewer/r/nMShPx Video recording] and [https://drive.google.com/file/d/1HjQNYmNkE090E52Wd8ZY5bJcL9WpcS_b/view complete slides]
*[[Direct writing|Direct Writing in the Heidelberg]] - June 29, 2018, Vishva Ray: [http://leccap.engin.umich.edu/leccap/viewer/r/FHNtrn Video recording] and [https://umich.box.com/s/e32m2hbk8tyyk9oza3v2ux1se2y2s5o3 complete slides]
+
*[[Direct writing|Direct Writing in the Heidelberg]] - June 29, 2018, Vishva Ray: [http://leccap.engin.umich.edu/leccap/viewer/r/FHNtrn Video recording] and [https://www.dropbox.com/s/2v6lm7dzfcsxvyj/2018-06%20Direct%20Writing%20in%20the%20Heidelberg.pdf?dl=0 complete slides]
 
*[[Atomic_layer_deposition|ALD]] - March 1, 2018,  Matthew Oonk: [http://leccap.engin.umich.edu/leccap/viewer/r/om1FC1 Video recording] and  [https://docs.google.com/presentation/d/e/2PACX-1vTqQzIUuDsK-dyQXg76boay3zriAwTJjtTlhLefItVbWLcdY0D3mF8BUDGMEfLptVsh4FM4-gbpCx70/pub?start=false&loop=false&delayms=5000 complete slides]
 
*[[Atomic_layer_deposition|ALD]] - March 1, 2018,  Matthew Oonk: [http://leccap.engin.umich.edu/leccap/viewer/r/om1FC1 Video recording] and  [https://docs.google.com/presentation/d/e/2PACX-1vTqQzIUuDsK-dyQXg76boay3zriAwTJjtTlhLefItVbWLcdY0D3mF8BUDGMEfLptVsh4FM4-gbpCx70/pub?start=false&loop=false&delayms=5000 complete slides]
*[[Finetech_Flip_Chip_Bonder|Flip Chip Bonding]] - October 26, 2017, Katharine Beach: [http://leccap.engin.umich.edu/leccap/viewer/r/Fbz58f Video recording] and [https://umich.box.com/s/zs08ta0zbcscso5l95n3ecw3gny4g5w3 complete slides]
+
*[[Finetech_Flip_Chip_Bonder|Flip Chip Bonding]] - October 26, 2017, Katharine Beach: [http://leccap.engin.umich.edu/leccap/viewer/r/Fbz58f Video recording] and [https://www.dropbox.com/s/ozkln3h12rkw3wx/2017-10%20Flip%20Chip%20Bonding.pdf?dl=0 complete slides]
*[[PECVD]] - April 14 2017, Brian Armstrong: [http://leccap.engin.umich.edu/leccap/viewer/r/I4ZHxw Video recording] and [https://umich.box.com/s/gu75hu45g9wuj28zod0apgxlz9ztjf23 complete slides]
+
*[[PECVD]] - April 14 2017, Brian Armstrong: [http://leccap.engin.umich.edu/leccap/viewer/r/I4ZHxw Video recording] and [https://www.dropbox.com/s/teczhpbuuiafy5e/2017-04%20PECVD%20Tech%20Talk.pdf?dl=0 complete slides]
*[[Substrate bonding|Wafer bonding]] - May 5, 2016, Greg Allion, Rob Hower: [http://leccap.engin.umich.edu/leccap/viewer/r/MJk0ZP Video recording] and [https://umich.box.com/s/1rn6oqy3evgs9v3val2o2ph76g6isk2v complete slides]
+
*[[Substrate bonding|Wafer bonding]] - May 5, 2016, Greg Allion, Rob Hower: [http://leccap.engin.umich.edu/leccap/viewer/r/MJk0ZP Video recording] and [https://www.dropbox.com/s/y04eau7vykqm6cg/2016-05%20LNF%20Tech%20Seminar%20Wafer%20Bonding.pdf?dl=0 complete slides]
*[[Cleaning|Wafer cleaning]] - March 25, 2016, Rob Hower, Kevin Owen, Nadine Wang, Greg Allion, and Pilar Herrera-Fierro: [http://leccap.engin.umich.edu/leccap/viewer/r/KvbSLu Video recording] and [https://umich.box.com/s/64y02h2lh36qybz4dg6xyxh8gs48tsy2 complete slides]
+
*[[Cleaning|Wafer cleaning]] - March 25, 2016, Rob Hower, Kevin Owen, Nadine Wang, Greg Allion, and Pilar Herrera-Fierro: [http://leccap.engin.umich.edu/leccap/viewer/r/KvbSLu Video recording] and [https://www.dropbox.com/s/buuj00iltubcdp5/2016-03-25%20LNF%20Tech%20Seminar%20Cleaning%20udpated.pdf?dl=0 complete slides]
*[[Annealing]] - November 21, 2014, Terre Briggs and Rob Hower: [https://umich.box.com/s/jv9l53jej6dl59m9ss11ep2apcjaf1q9 Slides]
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*[[Annealing]] - November 21, 2014, Terre Briggs and Rob Hower: [https://www.dropbox.com/s/qgfujuciy1o735x/2014-11%20Tech%20Sem%20Annealing%20TB-RH.pdf?dl=0 Slides]
  
 
===Archived Tech Talks===
 
===Archived Tech Talks===
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*[[LNF Alarm Sounds]]
 
*[[LNF Alarm Sounds]]
 
*[[LNF Map]]
 
*[[LNF Map]]
 
==Planning Your Processing==
 

Latest revision as of 12:43, 21 February 2022

This page provides information and resources for LNF users and other members of the LNF community. It includes details about laboratory policies and corresponding documentation that can be used as reference. Material from the LNF user communications meetings and the LNF technology seminar series are also archived on this page. Links to other resources that can be useful to the LNF community are also included.

General lab policies

This section includes links to the LNF user manual and other documents related to LNF policies.

Material and chemical policies

After-hours lab access

Safety policies and information

Usage charges and financial information

Communications

User communication meetings

The next User Communication Meeting will be scheduled later in Spring 2022

Please see below for slides presented during recent LNF User Communication Meetings, which provide updates about lab operations and other information relevant to the user community.
November 18, 2021 presentation slides
October 29th, 2020 presentation slides and video recording
October 4th, 2019
March 29th, 2019

Slides from earlier user communication meetings

Link to archived announcements, including LNF monthly email update

LNF Council

The LNF Council consists of at least six members, typically faculty users of the LNF from a variety of departments. The role of the LNF Council is to assist the LNF Director with strategic planning for the LNF and to provide guidance concerning operations. See this page for more details about the LNF Council. Feedback and/or questions about LNF operation are always encouraged. The LNF council is an important point of contact for independent discussions. You can contact them at LNF-council@umich.edu (please note that this email address does not include the LNF director or managing director, whose emails are blpeters@umich.edu and sandrine@umich.edu, respectively.

LNF Users Committee

The LNF Users Committee is formed by volunteer academic, or non academic, members of the LNF users community. The group meets every other week to discuss matters relevant to the users such as: lab improvement, policies, social activities, outreach, safety, etc. The LNF Users Committee is an important resource for LNF users as it is a path to voice concerns and bring new ideas and solutions. Users can contact the committee at LNFUsercommittee@umich.edu. All users are encouraged to participate and be part of this group. The LNF Users Committee has an important role in LNF outreach activities and the welcoming of new users.

Other communication methods

For more updates and to stay in touch, like us on Facebook or follow us on our general Twitter feed. And to ensure that you don't miss any time-sensitive announcements, subscribe to our LNF Alerts twitter feed!
For existing members of the LNF community, the Helpdesk ticket system is the best way to request something from the LNF staff.

In addition to the Contact Us page that is available on the LNF website, we have set up several email list to contact groups of LNF staff.

Virtual training modules

These modules are being developed to supplement in-person training sessions and allow for more effective support while maintaining the required low onsite occupancy and absence of group sessions. The first modules were released in September 2020 and more are being added as they are developped.

LNF Tech Talks (technology seminar series)

The LNF Tech Talks (formerly known as the LNF technology seminar series) aim at educating and better informing users of LNF capabilities and technologies. The talks typically start with an overview of the technology or technical topic, including physics and applications, then provides specifics details about the corresponding LNF capabilities. Finally, there are opportunities for discussion of LNF user specific challenges. All archived video recordings are available here. See below for individual recordings and separate copies of the slides.

During the lab closure due to the COVID-19 pandemic, we scheduled weekly virtual Quarantine Tech Talks. Slides and video recordings are listed below.

Slides from the 5/29/20 talk on ramping up research activities at the LNF are here and more details are available on the dedicated LNF wiki COVID-19 updates page

Archived Tech Talks

This is a page with older versions of LNF Tech Talks

Other resources

Here are additional resources that can be useful to the LNF community.

LNF acknowledgments

Logos, acknowledgments etc

Information for proposals

Facility description for proposals

Overview slide to include in presentations: see below for two layout options.


Additional pages