Difference between revisions of "Vertex Multi-Point Toxic Gas Monitoring System"

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===Hardware Details===
 
===Hardware Details===
 
ACT935 Photoresist Stripper
 
ACT935 Photoresist Stripper
Ammonia
 
Arsenic Pentafluoride
 
Arsenic Trichloride
 
Arsenic Trifluoride
 
Arsine
 
Boron Tribromide
 
Boron Trichloride
 
Boron Trifluoride
 
Carbonyl Fluoride
 
Chlorine
 
Chlorine Dioxide
 
Chlorine Trifluoride
 
Cupra Select
 
Diborane
 
Dichlorosilane
 
Digermane
 
Dimethylamine
 
Dimethylsilane
 
Disilane
 
Fluorine
 
Germane
 
Hexachlorodisilane
 
Hydrogen Bromide
 
Hydrogen Chloride
 
Hydrogen Cyanide
 
Hydrogen Fluoride
 
Hydrogen Iodide
 
Hydrogen Selenide
 
Hydrogen Sulfide
 
n-Butylamine
 
Nitric Acid
 
Nitrogen Dioxide
 
Nitrogen Trifluoride
 
Phenyl Trichlorosilane
 
Phosgene
 
Phosphine
 
Phosphorous Oxychloride
 
Phosphorous Pentachloride
 
Phosphorous Pentafluoride
 
Phosphorous Tribromide
 
Phosphorous Trichloride
 
Phosphorous Trifluoride
 
Silane
 
Silicon Tetrachloride
 
Silicon Tetrafluoride
 
Stibine
 
Sulfur Tetrafluoride
 
Tertiarybutylarsine
 
Tertiarybutylphosphine
 
Tetrachlorosilane
 
Tetrakis (dimethylamino) titanium
 
Tin Tetrachloride
 
Titanium Tetrachloride
 
Trichlorosilane
 
Trimethylsilane
 
Tungsten Hexafluoride
 
Xenon Difluoride
 

Revision as of 09:43, 10 March 2020

< Life Safety Systems

Vertex Multi-Point Toxic Gas Monitoring System
Vertex Multi-Point Toxic Gas Monitoring System
Equipment Details
Technology [[]]
Materials Restriction Undefined
Material Processed Amine, Chlorine, Fluorine, Hydride, Mineral Acid
Gases Used One system monitors up to nine gas families and more than 40 gases
Equipment Manual
Overview []
Operating Procedure SOP



Capabilities

Detect more than 40 Toxic Gases Sampling points can be up to 400 feet (120 meters) from the system. There is a choice of universal analyser modules and/or pyrolyzer analyzers. Simplified replacement of Chemcassettes® and automated optics verification

System Overview

The LNF has three Vertex systems spread across the lab to reach it's more than 150 points. Vertex one and two are located in 1445S. Vertex three is located in 14C10.

Hardware Details

ACT935 Photoresist Stripper