Difference between revisions of "Vertex Multi-Point Toxic Gas Monitoring System"

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[[LNF_Staff:Life_Safety_Systems|< Life Safety Systems]]
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{{infobox equipment
 
{{infobox equipment
 
|caption= Vertex Multi-Point Toxic Gas Monitoring System
 
|caption= Vertex Multi-Point Toxic Gas Monitoring System
 
|materials = Amine, Chlorine, Fluorine, Hydride, Mineral Acid
 
|materials = Amine, Chlorine, Fluorine, Hydride, Mineral Acid
|Monitoring = Extractive
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|Monitoring = Extraction
 
|gases = One system monitors up to nine gas families and more than 40 gases
 
|gases = One system monitors up to nine gas families and more than 40 gases
 
|overview = []
 
|overview = []
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==System Overview==
 
==System Overview==
The LNF has three Vertex systems spread across the lab to reach it's more than 150 points. Vertex one and two are located in 1445S. Vertex three is located in 14C10.
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The LNF has three Vertex systems spread across the lab to reach it's more than 150 points. Vertex one and two are located in 1445S. Vertex three is located in 14C10. Quarter inch PTFE tubing is run to sample locations locations across the EECS and LNF to sample the working environment.
  
 
===Hardware Details===
 
===Hardware Details===
ACT935 Photoresist Stripper
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* Up to 72 points of continuous gas detection. Vertex combines the most advanced Chemcassette, software and optics technologies into a flexible, easy-to-use, and reliable gas monitoring system.
Ammonia
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* Monitors up to 9 gas families/more than 40 gases.
Arsenic Pentafluoride
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* Sampling points can be up to 400 feet (120 meters) from the system.
Arsenic Trichloride
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* Choice of universal analyser modules and/or pyrolyzer analyzers.
Arsenic Trifluoride
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Arsine
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==Supported Processes==
Boron Tribromide
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# <!-- Describe the procedures for the tool. -->
Boron Trichloride
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Boron Trifluoride
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# Read through the [https://docs.google.com/document/d/10fTYApp5Q2AtszBnfSCl-JQtzrx_HI5lVbQFzmSsG4g/view?usp=sharing Detailed Operating Procedure].
Carbonyl Fluoride
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# Maintnenace is recorded and tracked in the [[https://docs.google.com/spreadsheets/d/1Io7uvB8EnsQGqoOxBqlz03nRpwsZOmq4mN-FUpYAIys/edit#gid=386094715| LSS Maintenance]] document in the Drive folder.
Chlorine
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Chlorine Dioxide
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Annual Maintenance Includes
Chlorine Trifluoride
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* Chemcassette Change
Cupra Select
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* Air Flow Calibration
Diborane
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* Filter Change
Dichlorosilane
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* Pump Switch-over
Digermane
 
Dimethylamine
 
Dimethylsilane
 
Disilane
 
Fluorine
 
Germane
 
Hexachlorodisilane
 
Hydrogen Bromide
 
Hydrogen Chloride
 
Hydrogen Cyanide
 
Hydrogen Fluoride
 
Hydrogen Iodide
 
Hydrogen Selenide
 
Hydrogen Sulfide
 
n-Butylamine
 
Nitric Acid
 
Nitrogen Dioxide
 
Nitrogen Trifluoride
 
Phenyl Trichlorosilane
 
Phosgene
 
Phosphine
 
Phosphorous Oxychloride
 
Phosphorous Pentachloride
 
Phosphorous Pentafluoride
 
Phosphorous Tribromide
 
Phosphorous Trichloride
 
Phosphorous Trifluoride
 
Silane
 
Silicon Tetrachloride
 
Silicon Tetrafluoride
 
Stibine
 
Sulfur Tetrafluoride
 
Tertiarybutylarsine
 
Tertiarybutylphosphine
 
Tetrachlorosilane
 
Tetrakis (dimethylamino) titanium
 
Tin Tetrachloride
 
Titanium Tetrachloride
 
Trichlorosilane
 
Trimethylsilane
 
Tungsten Hexafluoride
 
Xenon Difluoride
 

Latest revision as of 10:25, 10 March 2020

< Life Safety Systems

Vertex Multi-Point Toxic Gas Monitoring System
Vertex Multi-Point Toxic Gas Monitoring System
Equipment Details
Technology [[]]
Materials Restriction Undefined
Material Processed Amine, Chlorine, Fluorine, Hydride, Mineral Acid
Gases Used One system monitors up to nine gas families and more than 40 gases
Equipment Manual
Overview []
Operating Procedure SOP



Capabilities

Detect more than 40 Toxic Gases Sampling points can be up to 400 feet (120 meters) from the system. There is a choice of universal analyser modules and/or pyrolyzer analyzers. Simplified replacement of Chemcassettes® and automated optics verification

System Overview

The LNF has three Vertex systems spread across the lab to reach it's more than 150 points. Vertex one and two are located in 1445S. Vertex three is located in 14C10. Quarter inch PTFE tubing is run to sample locations locations across the EECS and LNF to sample the working environment.

Hardware Details

  • Up to 72 points of continuous gas detection. Vertex combines the most advanced Chemcassette, software and optics technologies into a flexible, easy-to-use, and reliable gas monitoring system.
  • Monitors up to 9 gas families/more than 40 gases.
  • Sampling points can be up to 400 feet (120 meters) from the system.
  • Choice of universal analyser modules and/or pyrolyzer analyzers.

Supported Processes

  1. Read through the Detailed Operating Procedure.
  2. Maintnenace is recorded and tracked in the [LSS Maintenance] document in the Drive folder.

Annual Maintenance Includes

  • Chemcassette Change
  • Air Flow Calibration
  • Filter Change
  • Pump Switch-over