Difference between revisions of "Vertex Multi-Point Toxic Gas Monitoring System"
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===Hardware Details=== | ===Hardware Details=== | ||
ACT935 Photoresist Stripper | ACT935 Photoresist Stripper | ||
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Revision as of 10:43, 10 March 2020
| Vertex Multi-Point Toxic Gas Monitoring System | |
|---|---|
|
Vertex Multi-Point Toxic Gas Monitoring System | |
| Equipment Details | |
| Technology | [[]] |
| Materials Restriction | Undefined |
| Material Processed | Amine, Chlorine, Fluorine, Hydride, Mineral Acid |
| Gases Used | One system monitors up to nine gas families and more than 40 gases |
| Equipment Manual | |
| Overview | [] |
| Operating Procedure | SOP |
Capabilities
Detect more than 40 Toxic Gases Sampling points can be up to 400 feet (120 meters) from the system. There is a choice of universal analyser modules and/or pyrolyzer analyzers. Simplified replacement of Chemcassettes® and automated optics verification
System Overview
The LNF has three Vertex systems spread across the lab to reach it's more than 150 points. Vertex one and two are located in 1445S. Vertex three is located in 14C10.
Hardware Details
ACT935 Photoresist Stripper
