Vertex Multi-Point Toxic Gas Monitoring System
| Vertex Multi-Point Toxic Gas Monitoring System | |
|---|---|
|
Vertex Multi-Point Toxic Gas Monitoring System | |
| Equipment Details | |
| Technology | [[]] |
| Materials Restriction | Undefined |
| Material Processed | Amine, Chlorine, Fluorine, Hydride, Mineral Acid |
| Gases Used | One system monitors up to nine gas families and more than 40 gases |
| Equipment Manual | |
| Overview | [] |
| Operating Procedure | SOP |
Capabilities
Detect more than 40 Toxic Gases Sampling points can be up to 400 feet (120 meters) from the system. There is a choice of universal analyser modules and/or pyrolyzer analyzers. Simplified replacement of Chemcassettes® and automated optics verification
System Overview
The LNF has three Vertex systems spread across the lab. Vertex one and two are located in 1445S. Vertex three is located in 14C10.
Hardware Details
ACT935 Photoresist Stripper Ammonia Arsenic Pentafluoride Arsenic Trichloride Arsenic Trifluoride Arsine Boron Tribromide Boron Trichloride Boron Trifluoride Carbonyl Fluoride Chlorine Chlorine Dioxide Chlorine Trifluoride Cupra Select Diborane Dichlorosilane Digermane Dimethylamine Dimethylsilane Disilane Fluorine Germane Hexachlorodisilane Hydrogen Bromide Hydrogen Chloride Hydrogen Cyanide Hydrogen Fluoride Hydrogen Iodide Hydrogen Selenide Hydrogen Sulfide n-Butylamine Nitric Acid Nitrogen Dioxide Nitrogen Trifluoride Phenyl Trichlorosilane Phosgene Phosphine Phosphorous Oxychloride Phosphorous Pentachloride Phosphorous Pentafluoride Phosphorous Tribromide Phosphorous Trichloride Phosphorous Trifluoride Silane Silicon Tetrachloride Silicon Tetrafluoride Stibine Sulfur Tetrafluoride Tertiarybutylarsine Tertiarybutylphosphine Tetrachlorosilane Tetrakis (dimethylamino) titanium Tin Tetrachloride Titanium Tetrachloride Trichlorosilane Trimethylsilane Tungsten Hexafluoride Xenon Difluoride
