Vertex Multi-Point Toxic Gas Monitoring System

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Vertex Multi-Point Toxic Gas Monitoring System
Vertex Multi-Point Toxic Gas Monitoring System
Equipment Details
Technology [[]]
Materials Restriction Undefined
Material Processed Amine, Chlorine, Fluorine, Hydride, Mineral Acid
Gases Used One system monitors up to nine gas families and more than 40 gases
Equipment Manual
Overview []
Operating Procedure SOP


Detect more than 40 Toxic Gases Sampling points can be up to 400 feet (120 meters) from the system. There is a choice of universal analyser modules and/or pyrolyzer analyzers. Simplified replacement of Chemcassettes® and automated optics verification

System Overview

The LNF has three Vertex systems spread across the lab to reach it's more than 150 points. Vertex one and two are located in 1445S. Vertex three is located in 14C10.

Hardware Details

ACT935 Photoresist Stripper Ammonia Arsenic Pentafluoride Arsenic Trichloride Arsenic Trifluoride Arsine Boron Tribromide Boron Trichloride Boron Trifluoride Carbonyl Fluoride Chlorine Chlorine Dioxide Chlorine Trifluoride Cupra Select Diborane Dichlorosilane Digermane Dimethylamine Dimethylsilane Disilane Fluorine Germane Hexachlorodisilane Hydrogen Bromide Hydrogen Chloride Hydrogen Cyanide Hydrogen Fluoride Hydrogen Iodide Hydrogen Selenide Hydrogen Sulfide n-Butylamine Nitric Acid Nitrogen Dioxide Nitrogen Trifluoride Phenyl Trichlorosilane Phosgene Phosphine Phosphorous Oxychloride Phosphorous Pentachloride Phosphorous Pentafluoride Phosphorous Tribromide Phosphorous Trichloride Phosphorous Trifluoride Silane Silicon Tetrachloride Silicon Tetrafluoride Stibine Sulfur Tetrafluoride Tertiarybutylarsine Tertiarybutylphosphine Tetrachlorosilane Tetrakis (dimethylamino) titanium Tin Tetrachloride Titanium Tetrachloride Trichlorosilane Trimethylsilane Tungsten Hexafluoride Xenon Difluoride