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Vertex Multi-Point Toxic Gas Monitoring System

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Vertex Multi-Point Toxic Gas Monitoring System
Vertex Multi-Point Toxic Gas Monitoring System
Equipment Details
Technology [[]]
Materials Restriction Undefined
Material Processed Amine, Chlorine, Fluorine, Hydride, Mineral Acid
Gases Used One system monitors up to nine gas families and more than 40 gases
Equipment Manual
Overview []
Operating Procedure SOP



Capabilities

Detect more than 40 Toxic Gases Sampling points can be up to 400 feet (120 meters) from the system. There is a choice of universal analyser modules and/or pyrolyzer analyzers. Simplified replacement of Chemcassettes® and automated optics verification

System Overview

The LNF has three Vertex systems spread across the lab to reach it's more than 150 points. Vertex one and two are located in 1445S. Vertex three is located in 14C10.

Hardware Details

ACT935 Photoresist Stripper