Xenon difluoride

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Xenon Difluoride is a chemical used for etching Si. It is a solid at standard temperature and pressure but sublimates to a gas at lower pressures. The Xactix XeF2 is the only tool in the lab that uses XeF2.


  • There are currently no processes defined that use this chemical.


Safety Data Sheet

SDS Sheet


Internal References: {Incoming} External References:

  • There are currently no external references