View source for YES-310TA

{{#vardefine:toolid|55131}} {{#vardefine:technology|Lithography}} {{#vardefine:restriction|3}}
{{infobox equipment
|caption = 
|materials = [[Photoresist]]
|mask =
|size = pieces up to 6" wafers
|chemicals = [[HMDS]]
|gases = [[Ammonia]]
|overview = [https://docs.google.com/document/d/1i0a8S2MGmC8Cmw9f3218E69H_soO187EaTTVVP8XMVg/preview System Overview]
|sop = [https://docs.google.com/document/d/1wNJSHZsImhCZJ3Ws9QIVE_04OcaK-64LxvLO2KO4Lik/preview SOP]
|processes = [https://docs.google.com/document/d/15AbmT5QVYIX_0gnG2B71kghy8kr_iDptuHUdK9E7818/preview Supported Processes]
|maintenance = [https://docs.google.com/document/d/1sa1Yi37izvvHsVQNm1iI46BnbkfbqhXDlC0IC29W4Vg/preview Maintenance]
|manufacturer = [http://www.yieldengineering.com/ Yield Engineering Systems]
|model = 310TA (E)
}}
The [[YES-310TA|YES-310TA (E)]] (scheduler name '''Image Reversal Oven''') is an [[image reversal]] and [[vapor prime]] oven designed by [http://www.yieldengineering.com/ Yield Engineering Systems].  It can vapor prime wafers with [[HMDS]] in order to improve photoresist adhesion.  It can also perform image reversal via [[Ammonia|NH<sub>3</sub>]].  The large oven chamber can easily accommodate anything from a piece to a box of wafers.

==Announcements==
*None at this time

==Capabilities==
* [[HMDS]] [[vapor prime]]
* [[Image reversal]] of positive photoresists
* [[Dehydration bake]]

==System overview==
===Hardware details===
* Heated Chamber: 30°C – 150°C
* Gases:  [[Nitrogen|N<sub>2</sub>]], [[Ammonia|NH<sub>3</sub>]], [[HMDS]]
* Alcatel ACP 28G Dry Vacuum Pump

===Substrate requirements===
* Can process a cassette of 4” or 6” wafers at once, or several pieces or several masks

===Material restrictions===
{{material restrictions}}

==Supported processes== 
There are two main processes for image reversal and HMDS, detailed below.  If these recipes do not suit your needs, please contact the tool engineers via the [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} helpdesk ticket system] for assistance.

===HMDS===
Recipe 1 on the tool is set for HMDS vapor prime.
{| class="wikitable"
! Total Time
! 20 min.
|-
| Process Time
| 300 sec
|-
| Warm Up Delay
| 5 min
|-
| Chamber Temperature
| 90°C
|-
| Dehydration Cycle Purges
| 3
|-
| Exit Cycle Purges
| 3
|}

===Image Reversal===
Recipe 2 on the tool is set for image reversal.
{| class="wikitable"
! Total Time
! 60 min.
|-
| Process Time
| 2700 sec
|-
| Warm Up Delay
| 10 min
|-
| Chamber Temperature
| 90°C
|-
| Dehydration Cycle Purges
| 3
|-
| Exit Cycle Purges
| 10
|}
More info can be found on the tools [https://docs.google.com/document/d/15AbmT5QVYIX_0gnG2B71kghy8kr_iDptuHUdK9E7818/preview supported processes].

==Standard operating procedure==
{{#widget:GoogleDoc|key=1wNJSHZsImhCZJ3Ws9QIVE_04OcaK-64LxvLO2KO4Lik}}

==Checkout procedure==
# Complete a [[lithography training session]]. If you have already completed this for another tool, you do not need to complete it again.
# Read through this page and the Standard Operating Procedure above.
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training.
# A tool engineer will schedule a time for initial training.
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
# Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.

==Maintenance== 
The YES Image Reversal oven is cleaned and maintaned as needed.  The HMDS level is checked regularly and refilled when low. Any relevant information regarding tool maintenance is captured in the user logbook or announced via email and the Announcements section on the LNF wiki page.

===User authorized maintenance===
In the event of a power bump, users may restart the tool by following the [https://docs.google.com/document/d/1iuGOF_OmAy66xBg7WMhsxI-AUsxyEk5vHf-6y904-ZQ/preview Startup/Shutdown Procedure].