Difference between revisions of "YES-310TA"
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| − | {{#vardefine:toolid|55131}} {{#vardefine:technology|Lithography}} {{#vardefine:restriction| | + | {{#vardefine:toolid|55131}} {{#vardefine:technology|Lithography}} {{#vardefine:restriction|4}} |
{{infobox equipment | {{infobox equipment | ||
|caption = | |caption = | ||
| Line 7: | Line 7: | ||
|chemicals = [[HMDS]] | |chemicals = [[HMDS]] | ||
|gases = [[Ammonia]] | |gases = [[Ammonia]] | ||
| − | |overview = [ | + | |overview = [[{{PAGENAME}}#System overview | System overview]] |
| − | |sop = [https://docs.google.com/document/d/ | + | |sop = [https://docs.google.com/document/d/1xYmCr6cKZW9NbrxOPRpTq-2pz9bC35B81OWjlu0TiF0/preview?usp=sharing User Manual] |
| − | |processes = [ | + | |processes = [[{{PAGENAME}}#Supported processes | Supported Processes]] |
| − | |maintenance = [ | + | |maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]] |
|manufacturer = [http://www.yieldengineering.com/ Yield Engineering Systems] | |manufacturer = [http://www.yieldengineering.com/ Yield Engineering Systems] | ||
|model = 310TA (E) | |model = 310TA (E) | ||
| Line 31: | Line 31: | ||
===Substrate requirements=== | ===Substrate requirements=== | ||
| − | * | + | |
| + | * Pieces: quantity dependant on piece size | ||
| + | * Single wafers: up to 8” diameter | ||
| + | * Cassettes: up to 25 wafers (4” or 6”) | ||
| + | * Mask plates: up to 7” square | ||
===Material restrictions=== | ===Material restrictions=== | ||
{{material restrictions}} | {{material restrictions}} | ||
| + | {{note|All polymers (including photoresist) must be fully cured before loading into the tool.|error}} | ||
==Supported processes== | ==Supported processes== | ||
| Line 61: | Line 66: | ||
|} | |} | ||
| − | ===Image | + | ===Image reversal=== |
| − | Recipe 2 on the tool is set for image reversal. | + | Recipe 2 on the tool is set for [[image reversal]]. |
| + | {{note|This is only one step of the image reversal process, please review the full [[Image_reversal#Procedure|procedure]] before attempting to run the recipe.|reminder}} | ||
{| class="wikitable" | {| class="wikitable" | ||
! Total Time | ! Total Time | ||
| Line 82: | Line 88: | ||
| 10 | | 10 | ||
|} | |} | ||
| − | + | ||
| + | ===Dehydration bake=== | ||
| + | Recipe 3 on the tool is set for vacuum bake. | ||
| + | {| class="wikitable" | ||
| + | ! Total Time | ||
| + | ! 40 min. | ||
| + | |- | ||
| + | | Process Time | ||
| + | | 1800 sec | ||
| + | |- | ||
| + | | Warm Up Delay | ||
| + | | 5 min | ||
| + | |- | ||
| + | | Chamber Temperature | ||
| + | | 90°C | ||
| + | |- | ||
| + | | Dehydration Cycle Purges | ||
| + | | 3 | ||
| + | |- | ||
| + | | Exit Cycle Purges | ||
| + | | 1 | ||
| + | |} | ||
==Standard operating procedure== | ==Standard operating procedure== | ||
| − | {{#widget:GoogleDoc|key= | + | '''[https://drive.google.com/file/d/13wK_A5qd9ImddTyKQiKA25Eip7dyMWZT/view?usp=sharing PDF Copy]''' |
| + | |||
| + | {{#widget:GoogleDoc|key=1xYmCr6cKZW9NbrxOPRpTq-2pz9bC35B81OWjlu0TiF0}} | ||
==Checkout procedure== | ==Checkout procedure== | ||
Follow this procedure to receive authorization to run supported processes. Practicing with an authorized user or staff member prior to checkout is strongly encouraged. | Follow this procedure to receive authorization to run supported processes. Practicing with an authorized user or staff member prior to checkout is strongly encouraged. | ||
# Complete a [[lithography training session]]. If you have already completed this for another tool, you do not need to complete it again. | # Complete a [[lithography training session]]. If you have already completed this for another tool, you do not need to complete it again. | ||
| − | # Read through this page and the | + | # Read through this page and the User Manual above. |
| − | # | + | # Accurately complete the [https://forms.gle/5euzupNs17kEqNvg7 checkout quiz]. You may retake as necessary until all answers are correct. |
# Schedule a time for a checkout: | # Schedule a time for a checkout: | ||
## Find an available time for checkout. | ## Find an available time for checkout. | ||
| Line 105: | Line 134: | ||
===User authorized maintenance=== | ===User authorized maintenance=== | ||
| − | + | Please review the troubleshooting section in the [https://docs.google.com/document/d/1xYmCr6cKZW9NbrxOPRpTq-2pz9bC35B81OWjlu0TiF0/preview#heading=h.51o7z7mdeuqk User Manual] for information on user-recoverable errors. | |
Latest revision as of 09:22, 15 October 2021
| YES-310TA | |
|---|---|
 | |
| Equipment Details | |
| Manufacturer | Yield Engineering Systems |
| Model | 310TA (E) |
| Technology | Lithography |
| Materials Restriction | General |
| Material Processed | Photoresist |
| Sample Size | pieces up to 6" wafers |
| Chemicals Used | HMDS |
| Gases Used | Ammonia |
| Equipment Manual | |
| Overview | System overview |
| Operating Procedure | User Manual |
| Supported Processes | Supported Processes |
| Maintenance | Maintenance |
The YES-310TA (E) (scheduler name Image Reversal Oven) is an image reversal and vapor prime oven designed by Yield Engineering Systems. It can vapor prime wafers with HMDS in order to improve photoresist adhesion. It can also perform image reversal via NH3. The large oven chamber can easily accommodate anything from a piece to a box of wafers.
Contents
Announcements
- None at this time
Capabilities
- HMDS vapor prime
- Image reversal of positive photoresists
- Dehydration bake
System overview
Hardware details
Substrate requirements
- Pieces: quantity dependant on piece size
- Single wafers: up to 8” diameter
- Cassettes: up to 25 wafers (4” or 6”)
- Mask plates: up to 7” square
Material restrictions
The YES-310TA is designated as a General class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.
Approved materials
All polymers (including photoresist) must be fully cured before loading into the tool.
Supported processes
There are two main processes for image reversal and HMDS, detailed below. If these recipes do not suit your needs, please contact the tool engineers via the helpdesk ticket system for assistance.
HMDS
Recipe 1 on the tool is set for HMDS vapor prime.
| Total Time | 20 min. |
|---|---|
| Process Time | 300 sec |
| Warm Up Delay | 5 min |
| Chamber Temperature | 90°C |
| Dehydration Cycle Purges | 3 |
| Exit Cycle Purges | 3 |
Image reversal
Recipe 2 on the tool is set for image reversal.
This is only one step of the image reversal process, please review the full procedure before attempting to run the recipe.
| Total Time | 60 min. |
|---|---|
| Process Time | 2700 sec |
| Warm Up Delay | 10 min |
| Chamber Temperature | 90°C |
| Dehydration Cycle Purges | 3 |
| Exit Cycle Purges | 10 |
Dehydration bake
Recipe 3 on the tool is set for vacuum bake.
| Total Time | 40 min. |
|---|---|
| Process Time | 1800 sec |
| Warm Up Delay | 5 min |
| Chamber Temperature | 90°C |
| Dehydration Cycle Purges | 3 |
| Exit Cycle Purges | 1 |
Standard operating procedure
Widget text will go here.
Checkout procedure
Follow this procedure to receive authorization to run supported processes. Practicing with an authorized user or staff member prior to checkout is strongly encouraged.
- Complete a lithography training session. If you have already completed this for another tool, you do not need to complete it again.
- Read through this page and the User Manual above.
- Accurately complete the checkout quiz. You may retake as necessary until all answers are correct.
- Schedule a time for a checkout:
- Find an available time for checkout.
- Verify that the tool is available in the LNF Online Services at the time you are requesting.
- After confirmation that the event is scheduled in Calendly, invite the staff member assigned to your event to a Staff Support reservation at that time.
- Create a helpdesk ticket for final confirmation of your checkout appointment.
- Authorization will be provided pending demonstration of proper tool use in the presence of a tool engineer.
Maintenance
The YES Image Reversal oven is cleaned and maintaned as needed. The HMDS level is checked regularly and refilled when low. Any relevant information regarding tool maintenance is captured in the user logbook or announced via email and the Announcements section on the LNF wiki page.
User authorized maintenance
Please review the troubleshooting section in the User Manual for information on user-recoverable errors.
