Difference between revisions of "YES-310TA"

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{{#vardefine:toolid|55131}} {{#vardefine:technology|Lithography}} {{#vardefine:restriction|3}}
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{{#vardefine:toolid|55131}} {{#vardefine:technology|Lithography}} {{#vardefine:restriction|4}}
 
{{infobox equipment
 
{{infobox equipment
 
|caption =  
 
|caption =  
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|chemicals = [[HMDS]]
 
|chemicals = [[HMDS]]
 
|gases = [[Ammonia]]
 
|gases = [[Ammonia]]
|overview = [https://docs.google.com/document/d/1i0a8S2MGmC8Cmw9f3218E69H_soO187EaTTVVP8XMVg/preview System Overview]
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|overview = [[{{PAGENAME}}#System overview | System overview]]
|sop = [https://docs.google.com/document/d/1wNJSHZsImhCZJ3Ws9QIVE_04OcaK-64LxvLO2KO4Lik/preview SOP]
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|sop = [https://docs.google.com/document/d/1xYmCr6cKZW9NbrxOPRpTq-2pz9bC35B81OWjlu0TiF0/preview?usp=sharing User Manual]
|processes = [https://docs.google.com/document/d/15AbmT5QVYIX_0gnG2B71kghy8kr_iDptuHUdK9E7818/preview Supported Processes]
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|processes = [[{{PAGENAME}}#Supported processes | Supported Processes]]
|maintenance = [https://docs.google.com/document/d/1sa1Yi37izvvHsVQNm1iI46BnbkfbqhXDlC0IC29W4Vg/preview Maintenance]
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|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
 
|manufacturer = [http://www.yieldengineering.com/ Yield Engineering Systems]
 
|manufacturer = [http://www.yieldengineering.com/ Yield Engineering Systems]
 
|model = 310TA (E)
 
|model = 310TA (E)
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===Substrate requirements===
 
===Substrate requirements===
* Can process a cassette of 4” or 6” wafers at once, or several pieces or several masks
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* Pieces: quantity dependant on piece size
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* Single wafers: up to 8” diameter
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* Cassettes: up to 25 wafers (4” or 6”)
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* Mask plates: up to 7” square
  
 
===Material restrictions===
 
===Material restrictions===
 
{{material restrictions}}
 
{{material restrictions}}
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{{note|All polymers (including photoresist) must be fully cured before loading into the tool.|error}}
  
 
==Supported processes==  
 
==Supported processes==  
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|}
 
|}
  
===Image Reversal===
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===Image reversal===
Recipe 2 on the tool is set for image reversal.
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Recipe 2 on the tool is set for [[image reversal]].
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{{note|This is only one step of the image reversal process, please review the full [[Image_reversal#Procedure|procedure]] before attempting to run the recipe.|reminder}}
 
{| class="wikitable"
 
{| class="wikitable"
 
! Total Time
 
! Total Time
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| 10
 
| 10
 
|}
 
|}
More info can be found on the tools [https://docs.google.com/document/d/15AbmT5QVYIX_0gnG2B71kghy8kr_iDptuHUdK9E7818/preview supported processes].
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===Dehydration bake===
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Recipe 3 on the tool is set for vacuum bake.
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{| class="wikitable"
 +
! Total Time
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! 40 min.
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|-
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| Process Time
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| 1800 sec
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|-
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| Warm Up Delay
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| 5 min
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|-
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| Chamber Temperature
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| 90°C
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|-
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| Dehydration Cycle Purges
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| 3
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|-
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| Exit Cycle Purges
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| 1
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|}
  
 
==Standard operating procedure==
 
==Standard operating procedure==
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===User authorized maintenance===
 
===User authorized maintenance===
In the event of a power bump, users may restart the tool by following the [https://docs.google.com/document/d/1iuGOF_OmAy66xBg7WMhsxI-AUsxyEk5vHf-6y904-ZQ/preview Startup/Shutdown Procedure].
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Please review the troubleshooting section in the [https://docs.google.com/document/d/1xYmCr6cKZW9NbrxOPRpTq-2pz9bC35B81OWjlu0TiF0/preview#heading=h.51o7z7mdeuqk User Manual] for information on user-recoverable errors.

Latest revision as of 09:22, 15 October 2021

YES-310TA
55131.jpg
Equipment Details
Manufacturer Yield Engineering Systems
Model 310TA (E)
Technology Lithography
Materials Restriction General
Material Processed Photoresist
Sample Size pieces up to 6" wafers
Chemicals Used HMDS
Gases Used Ammonia
Equipment Manual
Overview System overview
Operating Procedure User Manual
Supported Processes Supported Processes
Maintenance Maintenance


The YES-310TA (E) (scheduler name Image Reversal Oven) is an image reversal and vapor prime oven designed by Yield Engineering Systems. It can vapor prime wafers with HMDS in order to improve photoresist adhesion. It can also perform image reversal via NH3. The large oven chamber can easily accommodate anything from a piece to a box of wafers.

Announcements

  • None at this time

Capabilities

System overview

Hardware details

  • Heated Chamber: 30°C – 150°C
  • Gases: N2, NH3, HMDS
  • Alcatel ACP 28G Dry Vacuum Pump

Substrate requirements

  • Pieces: quantity dependant on piece size
  • Single wafers: up to 8” diameter
  • Cassettes: up to 25 wafers (4” or 6”)
  • Mask plates: up to 7” square

Material restrictions

The YES-310TA is designated as a General class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.


All polymers (including photoresist) must be fully cured before loading into the tool.

Supported processes

There are two main processes for image reversal and HMDS, detailed below. If these recipes do not suit your needs, please contact the tool engineers via the helpdesk ticket system for assistance.

HMDS

Recipe 1 on the tool is set for HMDS vapor prime.

Total Time 20 min.
Process Time 300 sec
Warm Up Delay 5 min
Chamber Temperature 90°C
Dehydration Cycle Purges 3
Exit Cycle Purges 3

Image reversal

Recipe 2 on the tool is set for image reversal.

This is only one step of the image reversal process, please review the full procedure before attempting to run the recipe.
Total Time 60 min.
Process Time 2700 sec
Warm Up Delay 10 min
Chamber Temperature 90°C
Dehydration Cycle Purges 3
Exit Cycle Purges 10

Dehydration bake

Recipe 3 on the tool is set for vacuum bake.

Total Time 40 min.
Process Time 1800 sec
Warm Up Delay 5 min
Chamber Temperature 90°C
Dehydration Cycle Purges 3
Exit Cycle Purges 1

Standard operating procedure

PDF Copy

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Checkout procedure

Follow this procedure to receive authorization to run supported processes. Practicing with an authorized user or staff member prior to checkout is strongly encouraged.

  1. Complete a lithography training session. If you have already completed this for another tool, you do not need to complete it again.
  2. Read through this page and the User Manual above.
  3. Accurately complete the checkout quiz. You may retake as necessary until all answers are correct.
  4. Schedule a time for a checkout:
    1. Find an available time for checkout.
    2. Verify that the tool is available in the LNF Online Services at the time you are requesting.
    3. After confirmation that the event is scheduled in Calendly, invite the staff member assigned to your event to a Staff Support reservation at that time.
  5. Create a helpdesk ticket for final confirmation of your checkout appointment.
  6. Authorization will be provided pending demonstration of proper tool use in the presence of a tool engineer.

Maintenance

The YES Image Reversal oven is cleaned and maintaned as needed. The HMDS level is checked regularly and refilled when low. Any relevant information regarding tool maintenance is captured in the user logbook or announced via email and the Announcements section on the LNF wiki page.

User authorized maintenance

Please review the troubleshooting section in the User Manual for information on user-recoverable errors.