YES-310TA
| YES-310TA | |
|---|---|
 | |
| Equipment Details | |
| Manufacturer | Yield Engineering Systems |
| Model | 310TA (E) |
| Technology | Lithography |
| Materials Restriction | Metals |
| Material Processed | Photoresist |
| Sample Size | pieces up to 6" wafers |
| Chemicals Used | HMDS |
| Gases Used | Ammonia |
| Equipment Manual | |
| Overview | System Overview |
| Operating Procedure | SOP |
| Supported Processes | Supported Processes |
| Maintenance | Maintenance |
The YES-310TA (E) (scheduler name Image Reversal Oven) is an image reversal and vapor prime oven designed by Yield Engineering Systems. It can vapor prime wafers with HMDS in order to improve photoresist adhesion. It can also perform image reversal via NH3. The large oven chamber can easily accommodate anything from a piece to a box of wafers.
Contents
Announcements
- None at this time
Capabilities
- HMDS vapor prime
- Image reversal of positive photoresists
- Dehydration bake
System overview
Hardware details
Substrate requirements
- Can process a cassette of 4” or 6” wafers at once, or several pieces or several masks
Material restrictions
The YES-310TA is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.
Supported processes
There are two main processes for image reversal and HMDS, detailed below. If these recipes do not suit your needs, please contact the tool engineers via the helpdesk ticket system for assistance.
HMDS
Recipe 1 on the tool is set for HMDS vapor prime.
| Total Time | 20 min. |
|---|---|
| Process Time | 300 sec |
| Warm Up Delay | 5 min |
| Chamber Temperature | 90°C |
| Dehydration Cycle Purges | 3 |
| Exit Cycle Purges | 3 |
Image Reversal
Recipe 2 on the tool is set for image reversal.
| Total Time | 60 min. |
|---|---|
| Process Time | 2700 sec |
| Warm Up Delay | 10 min |
| Chamber Temperature | 90°C |
| Dehydration Cycle Purges | 3 |
| Exit Cycle Purges | 10 |
More info can be found on the tools supported processes.
Standard operating procedure
Widget text will go here.
Checkout procedure
- Complete a lithography training session. If you have already completed this for another tool, you do not need to complete it again.
- Read through this page and the Standard Operating Procedure above.
- Create a Helpdesk Ticket requesting training.
- A tool engineer will schedule a time for initial training.
- Practice with your mentor or another authorized user until you are comfortable with tool operation.
- Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
Maintenance
The YES Image Reversal oven is cleaned and maintaned as needed. The HMDS level is checked regularly and refilled when low. Any relevant information regarding tool maintenance is captured in the user logbook or announced via email and the Announcements section on the LNF wiki page.
User authorized maintenance
In the event of a power bump, users may restart the tool by following the Startup/Shutdown Procedure.
