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The YES-310TA (E) (scheduler name Image Reversal Oven) is an image reversal and vapor prime oven designed by Yield Engineering Systems. It can vapor prime wafers with HMDS in order to improve photoresist adhesion. It can also perform image reversal via NH3. The large oven chamber can easily accommodate anything from a piece to a box of wafers.

YES-310TA
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Equipment Details
Manufacturer Yield Engineering Systems
Model 310TA (E)
Technology Lithography
Materials Restriction Metals
Material Processed Photoresist
Sample Size pieces up to 6" wafers
Chemicals Used HMDS
Gases Used Ammonia
Equipment Manual
Overview System Overview
Operating Procedure SOP
Supported Processes Supported Processes
Maintenance Maintenance

Contents

Announcements

  • None at this time

Capabilities

System overview

Hardware details

  • Heated Chamber: 30°C – 150°C
  • Gases: N2, NH3, HMDS
  • Alcatel ACP 28G Dry Vacuum Pump

Substrate requirements

  • Can process a cassette of 4” or 6” wafers at once, or several pieces or several masks

Material restrictions

The YES-310TA is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.


Supported processes

There are two main processes for image reversal and HMDS, detailed below. If these recipes do not suit your needs, please contact the tool engineers via the helpdesk ticket system for assistance.

HMDS

Recipe 1 on the tool is set for HMDS vapor prime.

Total Time 20 min.
Process Time 300 sec
Warm Up Delay 5 min
Chamber Temperature 90°C
Dehydration Cycle Purges 3
Exit Cycle Purges 3

Image Reversal

Recipe 2 on the tool is set for image reversal.

Total Time 60 min.
Process Time 2700 sec
Warm Up Delay 10 min
Chamber Temperature 90°C
Dehydration Cycle Purges 3
Exit Cycle Purges 10

More info can be found on the tools supported processes.

Standard operating procedure

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Checkout procedure

  1. Complete a lithography training session. If you have already completed this for another tool, you do not need to complete it again.
  2. Read through this page and the Standard Operating Procedure above.
  3. Create a Helpdesk Ticket requesting training.
  4. A tool engineer will schedule a time for initial training.
  5. Practice with your mentor or another authorized user until you are comfortable with tool operation.
  6. Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.

Maintenance

The YES Image Reversal oven is cleaned and maintaned as needed. The HMDS level is checked regularly and refilled when low. Any relevant information regarding tool maintenance is captured in the user logbook or announced via email and the Announcements section on the LNF wiki page.

User authorized maintenance

In the event of a power bump, users may restart the tool by following the Startup/Shutdown Procedure.