Difference between revisions of "YES-CV200RFS(E)"

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|chemicals =  
 
|chemicals =  
 
|gases = [[Oxygen|O<sub>2</sub>]]<br>[[Argon|Ar]]<br>[[Nitrogen|N<sub>2</sub>]]<br>[[Nitrogen trifluoride|NF<sub>3</sub>]]
 
|gases = [[Oxygen|O<sub>2</sub>]]<br>[[Argon|Ar]]<br>[[Nitrogen|N<sub>2</sub>]]<br>[[Nitrogen trifluoride|NF<sub>3</sub>]]
|overview = [https://docs.google.com/document/d/1_SuK2pT4-UpRSkNf-PoX7XqlG3RwligcaLaQCZWBUzI/preview System Overview]
+
|manual = [https://docs.google.com/document/d/1BIA91s15C-1ja4j1KIjTy3KRzyjeq0Fjywk2CdsCTtA/preview User Manual]
|sop = [https://docs.google.com/document/d/1GzEZMMOQftr7JyJfj8uesD_3cbGWVE3AN4Rg6y9DbKI/preview SOP]
+
|overview = [[{{PAGENAME}}#System_overview | System overview]]
|processes = [https://docs.google.com/document/d/1DZ8SI3aaDfWiGep59aFnqrxW6jufzdZ9JXu8U5ckWW4/preview Supported Processes]
+
|processes = [[{{PAGENAME}}#Supported_processes | Supported processes]]
 
|userprocesses =  
 
|userprocesses =  
 
|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
 
|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
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==Announcements==
 
==Announcements==
'''5/21/2020'''
+
'''9/1/2020'''
{{note|Several important changes to the operating procedure have been implemented. The new SOP has been placed at the tool for reference. At this time, all users’ access has been removed. In order to restore your access to the tool, please review the new SOP and complete the questions in the quiz (both referenced below). We will be reviewing responses weekly, but if you urgently need the tool, please also create a helpdesk ticket.|reminder}}
+
{{note|Usage of custom recipes on the tool now require additional training. Please follow the instructions in the checkout procedure below. The access code will be changed on October 1, 2020 and any users who have not completed the procedure will no longer have access to the recipe editor.|reminder}}
* [https://docs.google.com/document/d/1GzEZMMOQftr7JyJfj8uesD_3cbGWVE3AN4Rg6y9DbKI/preview SOP]
+
* [[{{PAGENAME}}#Super_user_checkout_procedure | Checkout procedure]]
* [https://docs.google.com/forms/d/e/1FAIpQLSeATwiGb6Xcj3qkHTf-itgDM6iodjWYsyetlaP8LlrjiuNbrA/viewform?usp=sf_link Quiz]
 
  
 
'''5/20/2020'''
 
'''5/20/2020'''
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* [[Fluorocarbon]] removal in high aspect ratio structures
 
* [[Fluorocarbon]] removal in high aspect ratio structures
  
==System Overview==
+
==System overview==
 
===Hardware Details===
 
===Hardware Details===
 
* Downstream RF plasma: up to 1000 W
 
* Downstream RF plasma: up to 1000 W
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* Gases: O<sub>2</sub>, Ar, N<sub>2</sub>, NF<sub>3</sub>
 
* Gases: O<sub>2</sub>, Ar, N<sub>2</sub>, NF<sub>3</sub>
  
===Substrate Requirements===
+
===Substrate requirements===
 
* Handles up to 8” wafers and wafer pieces
 
* Handles up to 8” wafers and wafer pieces
* Single wafer processing
+
* Single wafer processing (or dual 4" wafers)
 
* Max sample thickness: 3 mm
 
* Max sample thickness: 3 mm
  
===Material Restrictions===
+
===Material restrictions===
 
{{material restrictions}}
 
{{material restrictions}}
  
==Supported Processes==  
+
==Supported processes==  
 
The tool is provided with 6 characterized recipes, shown in the table below. Process time is chosen on the main panel before starting the recipe. The original process times for recipes 1, 2, and 4 have been included for reference. If you need process adjustment beyond this, please consult a tool engineer before creating a recipe to be authorized to edit recipes, and please do not save over the 6 supported recipes. There are 12 recipe slots in total, please save your recipe to one of 7-12. We cannot guarantee that it will be there for your next run, so remember to write down your settings.
 
The tool is provided with 6 characterized recipes, shown in the table below. Process time is chosen on the main panel before starting the recipe. The original process times for recipes 1, 2, and 4 have been included for reference. If you need process adjustment beyond this, please consult a tool engineer before creating a recipe to be authorized to edit recipes, and please do not save over the 6 supported recipes. There are 12 recipe slots in total, please save your recipe to one of 7-12. We cannot guarantee that it will be there for your next run, so remember to write down your settings.
  
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|}
 
|}
  
Custom recipes may be created and saved in slots 7-12. For instructions on how to use the recipe editor, please follow the guide in section F of the SOP (below). For some guidelines on recipe development, please review the [https://docs.google.com/document/d/1DZ8SI3aaDfWiGep59aFnqrxW6jufzdZ9JXu8U5ckWW4/preview standard processes] document. Custom recipes may be documented on [[LNF User:{{BASEPAGENAME}} User Processes|{{BASEPAGENAME}} User Processes]]. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.
+
Use of custom recipes requires additional training. Please see the [[{{PAGENAME}}#Super_user_checkout_procedure | checkout procedure]] below. Custom recipes may be documented on [[LNF User:{{BASEPAGENAME}} User Processes|{{BASEPAGENAME}} User Processes]]. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.
  
==Standard Operating Procedure==
+
==Standard operating procedure==
 
<!-- To include a document from google docs, use the line below, replace "googledocid" with the ID for the document. Remember, to make this visible, you must set Sharing for the document to "Anyone with the link can view". -->
 
<!-- To include a document from google docs, use the line below, replace "googledocid" with the ID for the document. Remember, to make this visible, you must set Sharing for the document to "Anyone with the link can view". -->
{{#widget:GoogleDoc|key=1GzEZMMOQftr7JyJfj8uesD_3cbGWVE3AN4Rg6y9DbKI}}
+
The operating system can be found in the complete user manual, found [https://docs.google.com/document/d/1BIA91s15C-1ja4j1KIjTy3KRzyjeq0Fjywk2CdsCTtA/preview here].
 +
<!--{{#widget:GoogleDoc|key=1GzEZMMOQftr7JyJfj8uesD_3cbGWVE3AN4Rg6y9DbKI}}-->
 +
 
 +
==Checkout procedure==
 +
Follow this procedure to receive authorization to run supported processes. Practicing with an authorized user or staff member is strongly recommended but not required.
 +
# Read this page and the [https://docs.google.com/document/d/1BIA91s15C-1ja4j1KIjTy3KRzyjeq0Fjywk2CdsCTtA/preview user manual].
 +
# Accurately complete the [https://docs.google.com/forms/d/e/1FAIpQLScO2ww44I-yWO5of79tBhYEdsKA3t-KqhlBq1bg-5sgMtpaVQ/viewform?usp=sf_link checkout quiz] (you may retake if necessary).
 +
# Create a helpdesk ticket requesting authorization.
 +
# Given successful completion of the quiz, a tool engineer will authorize you on the tool.
  
==Checkout Procedure==
 
{{note|Several important changes to the operating procedure have been implemented. The new SOP has been placed at the tool for reference. At this time, all users’ access has been removed. In order to restore your access to the tool, please review the new SOP and complete the questions in the quiz (both referenced below). We will be reviewing responses weekly, but if you urgently need the tool, please also create a helpdesk ticket.|reminder}}
 
* [https://docs.google.com/document/d/1GzEZMMOQftr7JyJfj8uesD_3cbGWVE3AN4Rg6y9DbKI/preview SOP]
 
* [https://docs.google.com/forms/d/e/1FAIpQLSeATwiGb6Xcj3qkHTf-itgDM6iodjWYsyetlaP8LlrjiuNbrA/viewform?usp=sf_link Quiz]
 
 
The following steps should be taken to gain access to the tool:
 
The following steps should be taken to gain access to the tool:
 
# Read through this page and the Standard Operating Procedure above.
 
# Read through this page and the Standard Operating Procedure above.
 
# Practice on the tool with a qualified user
 
# Practice on the tool with a qualified user
 
# Complete the checkout quiz found [https://docs.google.com/a/lnf.umich.edu/spreadsheet/viewform?formkey=dEg0Slk3LVhfWlVLZW9oYXo4ZnNISVE6MQ#gid=0 here]
 
# Complete the checkout quiz found [https://docs.google.com/a/lnf.umich.edu/spreadsheet/viewform?formkey=dEg0Slk3LVhfWlVLZW9oYXo4ZnNISVE6MQ#gid=0 here]
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting checkout. If this checkout is successful, the engineer will authorize you on the tool.
+
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} helpdesk ticket] requesting checkout. If this checkout is successful, the engineer will authorize you on the tool.
  
===Super User Checkout Procedure===
+
===Super user checkout procedure===
Coming soon...
+
# Complete the [https://docs.google.com/forms/d/e/1FAIpQLSfgiDv7_WOe_a0F3FPPf2QtZTn2xNUAJlCful_o15C5T1WJlw/viewform?usp=sf_link process request form] and create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} helpdesk ticket].
 +
# Review the procedure provided in the ticket response.
 +
# Accurately complete the quiz provided in the ticket response.
 +
# Arrange a training session with a tool engineer via the ticket.
 +
# Given successful completion of the quiz and demonstration of proper tool operation, a tool engineer will provide the access code. Do not share the access code.
  
 
==Maintenance==  
 
==Maintenance==  

Revision as of 18:07, 31 August 2020

YES-CV200RFS(E)
10061.jpg
Equipment Details
Manufacturer Yield Engineering Systems
Model CV200RFS(E)
Technology Plasma etching
Materials Restriction Metals
Material Processed photoresist, polymers
Sample Size pieces up to 8" wafers
Gases Used O2
Ar
N2
NF3
Equipment Manual
User Manual User Manual
Overview System overview
Supported Processes Supported processes
Maintenance Maintenance


The YES-CV200RFS(E) is a single wafer, downstream plasma strip/descum tool designed by Yield Engineering Systems. It is designed for fast plasma stripping of photoresists and other organic materials at up to 7000 Å/min. It can also be used for surface modification and gentle surface cleaning. It supports pieces and wafers from 2” to 8” and wafer pieces. The tool mainly uses oxygen plasma for organics removal, but it has been configured with three additional process gases (Ar, N2, and NF3), for additional stripping and surface modification techniques.

Announcements

9/1/2020

Usage of custom recipes on the tool now require additional training. Please follow the instructions in the checkout procedure below. The access code will be changed on October 1, 2020 and any users who have not completed the procedure will no longer have access to the recipe editor.

5/20/2020

NF3 is offline. Do not use recipe 6 or custom recipes containing NF3 (gas #4).

Capabilities

  • Photoresist descum (600 Å/min)
  • Photoresist stripping (6000 Å/min)
  • High temperature plasma cleaning/organics etching
  • PDMS surface activation
  • Sacrificial polymer layer release
  • Fluorocarbon removal in high aspect ratio structures

System overview

Hardware Details

  • Downstream RF plasma: up to 1000 W
  • Heated chuck: 30°C – 200°C
  • Gases: O2, Ar, N2, NF3

Substrate requirements

  • Handles up to 8” wafers and wafer pieces
  • Single wafer processing (or dual 4" wafers)
  • Max sample thickness: 3 mm

Material restrictions

The YES-CV200RFS(E) is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.


Supported processes

The tool is provided with 6 characterized recipes, shown in the table below. Process time is chosen on the main panel before starting the recipe. The original process times for recipes 1, 2, and 4 have been included for reference. If you need process adjustment beyond this, please consult a tool engineer before creating a recipe to be authorized to edit recipes, and please do not save over the 6 supported recipes. There are 12 recipe slots in total, please save your recipe to one of 7-12. We cannot guarantee that it will be there for your next run, so remember to write down your settings.

Purpose Chamber clean Strip photoresist Descum Strip KMPR
(prev) 3 μm any (prev) 200 Å any any
Recipe # 1 2 3 4 5 6
Time (sec) (prev) 300 (prev) 360 var. (prev) 20 var. var.
Chuck temp. (°C) 60 150 60 150
O2 flow (sccm) 50 80 35 80
NF3 flow (sccm) 0 0 0 8
Power (W) 800 800 100 800
Etch rate (Å/min) 5000 600
Uniformity (%) 1.5 20

Use of custom recipes requires additional training. Please see the checkout procedure below. Custom recipes may be documented on YES-CV200RFS(E) User Processes. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.

Standard operating procedure

The operating system can be found in the complete user manual, found here.

Checkout procedure

Follow this procedure to receive authorization to run supported processes. Practicing with an authorized user or staff member is strongly recommended but not required.

  1. Read this page and the user manual.
  2. Accurately complete the checkout quiz (you may retake if necessary).
  3. Create a helpdesk ticket requesting authorization.
  4. Given successful completion of the quiz, a tool engineer will authorize you on the tool.

The following steps should be taken to gain access to the tool:

  1. Read through this page and the Standard Operating Procedure above.
  2. Practice on the tool with a qualified user
  3. Complete the checkout quiz found here
  4. Create a helpdesk ticket requesting checkout. If this checkout is successful, the engineer will authorize you on the tool.

Super user checkout procedure

  1. Complete the process request form and create a helpdesk ticket.
  2. Review the procedure provided in the ticket response.
  3. Accurately complete the quiz provided in the ticket response.
  4. Arrange a training session with a tool engineer via the ticket.
  5. Given successful completion of the quiz and demonstration of proper tool operation, a tool engineer will provide the access code. Do not share the access code.

Maintenance

The chamber is disassembled and cleaned once per quarter and process condition is verified.

User Authorized Maintenance

The only maintenance that users are authorized to perform is tool startup in the event of a power bump. Please see the Startup and Shutdown Procedure for more details.